Development of a bi-directional valve-less silicon micro pump controlled by driving waveform

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 83-87

  Hayamizu, Shunichi ^a,b   Higashino, Kusunoki ^a   Fujii, Yasuhisa ^a   Sando, Yasuhiro ^a   Yamamoto, Koji ^a  

^a Konica Corporation   (Japan)

^b NONE   (Japan)

Author keywords

Bi directional; DRIE; Equivalent circuit model; Micro pump

Indexed keywords

EQUIVALENT CIRCUITS; PUMPS; VALVES (MECHANICAL); WAVEFORM ANALYSIS;

SILICON MICRO PUMPS;

SILICON;

EID: 0037439008     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00322-9     Document Type: Conference Paper

References (5)

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4. W. Wijngaat, H. Anderson, P. Enoksson, K. Noren, G. Stemme, The first self-priming and bi-directional valve-less diffuser micropump for both liquid and gas, in: Proceedings of the IEEE MEMS 1999, Tech. Digest, Orland, FL, USA, January 23, 2000.
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