A novel valve-less synthetic-jet-based micro-pump

Sensors and Actuators, A: Physical

Volumn 122, Issue 1 SPEC. ISS., 2005, Pages 131-140

  Luo, Zhen Bing ^a   Xia, Zhi Xun ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

Design criterion; Dividing clapboard; Flow control; MEMS; Micro pump; Numerical simulation; Synthetic jet

Indexed keywords

COMPUTER SIMULATION; ELECTROOSMOSIS; ELECTROSTATICS; FLOW CONTROL; FLUXES; JET PUMPS; PIEZOELECTRICITY; PRESSURE DROP;

DESIGN CRITERION; DIVIDING-CLAPBOARD; MICRO-PUMP; SYNTHETIC JET;

MICROELECTROMECHANICAL DEVICES;

EID: 22944447472     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.062     Document Type: Article

References (19)

1. W. Lang Reflexions on the future of microsystems Sens. Actuators 72 1999 1 15
2. J.G. Smits Piezoelectric micropump with three valves working peristaltically Sens. Actuators 20 1989 203 206
3. R. Zengerle, S. Kluge, M. Richter, and A. Richte A bidirectional silicon micropump Proceedings of the MEMS'95 Amsterdam, The Netherlands 29 January-2 February 1995 19 24
4. S. Böhm, W. Olthuis, and P. Bergveld A plastic micropump constructed with conventional techniques and materials Sens. Actuators 77 1999 223 228
5. K. Yanagisawa, H. Kuwano, and A. Tago An Electromagnetically Driven Microvalve Tech. Digest of Transducers'93 Yokohama, Japan 7-10 June 1993 102 105
6. F.C.M. van de Pol, H.T.G. van Lintel, M. Elvenspoek, and J.H.J. Fluitman A thermopneumatic micropump based on micro-engineering techniques Sens. Actuators 21-23 1990 198 202
7. S. Mutlu, C. Yu, P. Selvaganpathy, F. Svec, C.H. Mastrangelo, and J.M.J. Frechet The 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 2002 19 25
8. Y.Y. Fang, Z.Y. Zhou, and X.Y. Ye Progresses on technologies of driving and controlling micro-fluids Adv. Mech. 32 1 2002 1 16 (in Chinese)
9. X.H. Wang, Z.Y. Zhou, and X.Y. Ye PZT-Driven micro-pump Proceedings of the international symposium on micro-mechanics and human science MHS, Nagoya, Japan 1997 231 234
10. E. Stemme, and G. Stemme A Novel Piezoelectric Valve-less Fluid Pump The Seventh International Conference on Solid State Sensors and Actuators Yokohama, Japan Tech. Digest IEEE Transducers 1993 110 113
11. A. Glezer, and M. Amitay Synthetic-jets Annu. Rev. Fluid Mech. 34 2002 503 529
12. S.G. Mallinson, J.A. Reizes, and G. Hong An experimental and numerical study of synthetic-jet flow Aeronautical J. 105 2001 41 49
13. Y. Li, and X. Ming Control of two-dimensional jets using miniature zero mass flux jets Chinese J. Aeronautics 13 3 2000 129 133
14. Z.B. Luo, Mechanism and applications investigation of synthetic jet, Master Thesis, National University of Defense Technology, China, 2002 (in Chinese).
15. H.S. Tsien Super-aerodynamics, mechanics of rarefied gases J. Aeronautical Sci. 13 1946 653 664
16. Z.B. Luo, Z.X. Xia, and J.X. Hu Numerical simulation of synthetic-jet flow field and parameter analysis of actuator J. Propul. Technol. 25 3 2004 199 205
17. C. Lee, G. Hong, Q.P. Ha, and S.G. Mallinson A piezoelectrically actuated micro synthetic jet for active flow control Sens. Actuators A: Phys. 108 2003 168 174
18. F. Yang, and A. Kao Analysis of fluid flow and deflection for pressure-balanced MEMS diagram valves Sens. Actuators 79 2000 13 21
19. D.A. Lockerby, and P.W. Carpenter Modeling and design of micro-jet actuators AIAA J. 42 2 2004 220 227