A resonant tuning fork force sensor with unprecedented combination of resolution and range

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 545-548

  Azgin, K ^a   Ro, C ^a   Torrents, A ^a   Akin, T ^b   Valdevit, L ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT PRESSURES; DISPLACEMENT ACTUATOR; DISPLACEMENT RESOLUTION; DOUBLE-ENDED TUNING FORKS; FORCE SENSOR; LOAD RESONANT FREQUENCY; MICRO-MECHANICAL; Q-FACTORS; READ-OUT CIRCUIT; SCALE FACTOR; TUNING FORKS;

ELECTRONIC EQUIPMENT MANUFACTURE; MECHANICAL ENGINEERING; MECHANICS; MEMS; NATURAL FREQUENCIES; REACTIVE ION ETCHING; SENSORS; TUNING;

PRINTED CIRCUIT BOARDS;

EID: 79953784666     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734482     Document Type: Conference Paper

References (6)

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