A BE-SOI MEMS for inertial measurement in geophysical applications

IEEE Transactions on Instrumentation and Measurement

Volumn 60, Issue 5, 2011, Pages 1901-1908

  Andò, Bruno ^a   Baglio, Salvatore ^a   L'Episcopo, Gaetano ^a   Marletta, Vincenzo ^a   Savalli, Nicolò ^a   Trigona, Carlo ^a  

^a UNIVERSITY OF CATANIA   (Italy)

Author keywords

Bulk and etch silicon on insulator (BE SOI); inertial sensor; low cost; microelectromechanical system (MEMS); seismic measurements; volcanic monitoring

Indexed keywords

INERTIAL SENSOR; LOW COST; MICROELECTROMECHANICAL SYSTEMS; SEISMIC MEASUREMENTS; SILICON ON INSULATOR; VOLCANIC MONITORING;

COMPOSITE MICROMECHANICS; INERTIAL NAVIGATION SYSTEMS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MONITORING; SEISMOLOGY; SENSORS; VOLCANOES;

SILICON ON INSULATOR TECHNOLOGY;

EID: 79953780597     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2011.2108077     Document Type: Conference Paper

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