A BE-SOI MEMS for inertial measurement in geophysical applications

2010 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2010 - Proceedings

Volumn , Issue , 2010, Pages 1326-1330

  Ando B ^a   Baglio, S ^a   Marletta, V ^a   Savalli, N ^a   Trigona, C ^a   Carbone, D ^b   Patane D ^b   Rapisarda, S ^b   Zuccarello, L ^b  

^a UNIVERSITY OF CATANIA   (Italy)

^b ISTITUTO NAZIONALE DI GEOFISICA E VULCANOLOGIA   (Italy)

Author keywords

BE SOI; Inertial sensor; Low cost; MEMS; Volcanic monitoring

Indexed keywords

BE-SOI; DEVICE OPERATIONS; GEOPHYSICAL APPLICATIONS; INERTIAL MEASUREMENTS; INERTIAL SENSOR; LOW COSTS; LOW FREQUENCY; LOW-COST; MEMS TECHNOLOGY; MONITORING SITES; PROPOSED ARCHITECTURES; SENSOR DESIGNS; SOI-MEMS; VOLCANIC MONITORING;

INERTIAL NAVIGATION SYSTEMS; INSTRUMENTS; MEASUREMENT THEORY; SENSORS; TECHNOLOGY; VOLCANOES;

MONITORING;

EID: 77957843805     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMTC.2010.5488022     Document Type: Conference Paper

References (13)

1. Sparks R.S.J. "Forecasting volcanic eruptions", Earth and Planetary Science Letters 210 (2003), pp. 1-15
2. B.A. Chouet, "Long-period volcano seismicity: its source and use in eruption forecasting", Nature 380 (1996), pp. 309-316
3. D. Dzurisin, "Volcano geodesy: challenges and opportunities for the 21st century", Phil. Trans. R. Soc. 358 (2000) 1547-1566.
4. B. Galle, C. Oppenheimer, A. Geyer, A. McGonigle, M. Edmonds, L.A. Horrocks, "A miniaturised ultraviolet spectrometer for remote sensing of SO2 £uxes: a new tool for volcano surveillance", J. Volcanol. Geotherm. Res. 119 (2003), pp. 241-254.
5. Carbone, D., Zuccarello, L., Saccorotti, G., Greco, F., "Analysis of simultaneous gravity and tremor anomalies observed during the 2002-2003 Etna eruption". Earth Plan. Sc. Lett., 245, (2006), pp. 616-629.
6. Carbone, D., Currenti G., Del Negro, C., Multiobjective genetic algorithm inversion of ground deformation and gravity changes spanning the 1981 eruption of Etna volcano. J. Geophys. Res., 113, B07406, doi:10.1029/2006JB004917, (2008).
7. Carbone, D., Budetta, G., Greco F., Rymer, H., Combined discrete and continuous gravity observations at Mt. Etna. J. Volcanol. Geoth. Res., 123, (2003), pp. 123-135.
8. th ACM conference on Computer and Communications Security, pp. 52-61, 2003.
9. B. Andò, S. Baglio, N.Savalli, C. Trigona, M. Baù, V. Ferrari, D. Marioli, E. Sardini, M. Serpelloni, "Development of a contactless resonant MEMS force sensor in SOI technology", Eurosensors XXII, pp.421-424, 2008.
10. 2MTC 2009, pp. 1423-1428.
11. B. Andò, S. Baglio, A. Beninato, V. Marletta, "An integrated differential inductive sensor implementing bio-immunoassay", IEEE Biosensing, 2009.
12. Fedder G.K. Simulations of Microelectromechanical Systems, PhD Thesis, Dept. of Electrical Engineering and Computer Science, University of California at Berkeley, Berkeley, California, 1994.
13. Lagarias, J.C., J. A. Reeds, M. H. Wright, and P. E. Wright, "Convergence Properties of the Nelder-Mead Simplex Method in Low Dimensions", SIAM Journal of Optimization, Vol. 9 No 1, pp. 112-147, 1998.