Hybrid telemetric MEMS for high temperature measurements into harsh industrial environments

2009 IEEE Intrumentation and Measurement Technology Conference, I2MTC 2009

Volumn , Issue , 2009, Pages 1423-1428

  Marioli, D ^a   Sardini, E ^a   Serpelloni, M ^a   Ando B ^b   Baglio, S ^b   Savalli, N ^b   Trigona, C ^b  

^a UNIVERSITY OF BRESCIA   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

Contactless telemetric system; High temperature measurement; MEMS; Predictive maintenance; Process control; Wireless system

Indexed keywords

ELECTRIC INDUCTORS; HYBRID SENSORS; MEMS; PREDICTIVE MAINTENANCE; PROCESS CONTROL; RESONANT CIRCUITS; TEMPERATURE MEASUREMENT;

ATTRACTIVE SOLUTIONS; COMPLEX ENVIRONMENTS; HIGH TEMPERATURE MEASUREMENT; HIGH-TEMPERATURE ENVIRONMENT; INDUSTRIAL ENVIRONMENTS; LC RESONANT CIRCUITS; TELEMETRIC SYSTEMS; WIRELESS SYSTEMS;

CAPACITIVE SENSORS;

EID: 70449984886     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMTC.2009.5168678     Document Type: Conference Paper

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