A subnanowatt microbubble pressure sensor based on electrochemical impedance transduction in a flexible all-parylene package

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 549-552

  Gutierrez, Christian A ^a   Meng, Ellis ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUBBLE SIZE; DEVICE DESIGN; ELECTROCHEMICAL IMPEDANCE; EXTERNAL PRESSURES; HERMETIC PACKAGING; IN-VIVO; LIQUID ENVIRONMENT; LOW POWER; MICRO-BUBBLE; MICRO-CHAMBERS; PARYLENES; POSITIVE PRESSURE;

ELECTROCHEMICAL CORROSION; ELECTROCHEMISTRY; HYDROSTATIC PRESSURE; MECHANICAL ENGINEERING; MECHANICS; PRESSURE MEASUREMENT; PRESSURE SENSORS; REACTIVE ION ETCHING; TRANSDUCERS;

MEMS;

EID: 79953772977     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734483     Document Type: Conference Paper

References (10)

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