Passive Wireless Monitoring of Wafer Cleanliness during Rinsing of Semiconductor Wafers

IEEE Sensors Journal

Volumn 10, Issue 6, 2010, Pages 1048-1055

  Zhang, Xu ^a   Yan, Jun ^b   Vermeire, Bert ^a   Shadman, Farhang ^b   Chae, Junseok ^a  

^a Arizona State University   (United States)

^b University of Arizona   (United States)

Author keywords

Passive sensing; Rinsing monitoring; Wafer rinse; Water saving; Wireless sensing

Indexed keywords

CHEMICAL RESIDUES; CHEMICAL SENSOR SYSTEMS; CONCENTRATION RANGES; COUPLED INDUCTOR; IMPURITIES CONCENTRATION; IN-SITU; IN-SITU MONITORING; MICROFEATURES; MICROMACHINED; ON-WAFER; PASSIVE SENSING; PROTOTYPE SYSTEM; RELATIVE UNCERTAINTY; REMOTE RF; RFID TECHNOLOGY; RINSE WATER; RINSING PROCESS; SEMI-CONDUCTOR WAFER; SENSOR READINGS; SODIUM CHLORIDE SOLUTION; TRANSPONDER CIRCUITRY; WATER USE; WIRELESS LINK; WIRELESS MONITORING; WIRELESS SENSING; WIRELESS SYSTEMS;

CLEANING; MONITORING; SENSORS; SODIUM; SODIUM CHLORIDE; TRANSPONDERS; WATER CONSERVATION; WATER SUPPLY;

SILICON WAFERS;

EID: 77950839229     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2042443     Document Type: Article

References (19)

1. J. DeGenova and F. Shadman, "Recovery, reuse, and recycle, of water in semiconductor wafer fabrication facilities," Environm. Progress16 263-267, 1997.
2. S. N.Kempka, J. R. Torczynski, A. S. Geller, J. J. Rosato, R. N.Walters, and S. S. Sibbett, "Evaluating the efficiency of overflow wet rinsing," Micro.41 41-46, 1995.
3. K. K. Christenson, "Rinsing: A critical process in contamination removal," J. Inst. Environ. Sci. 45-50, 1997.
4. I. I. Kashkoush and R. E. Novak, "Water consumption and rinse considerations in semiconductor wet processing," Proc. Electrochem. Soc.95-20 421-425, 1995.
5. J. Yan, K. Dhane, B. Vermeire, and F. Shadman, "In situ and real-time metrology during rinsing of micro- and nano-structures," Microelectron. Eng.86 199-205, 2009.
6. J. Yan, D. Seif, S. Raghavan, H. J. Barnaby, B. Vermeire, T. Peterson, and F. Shadman, "Sensor for monitoring the rinsing of patterned wafers," IEEE T. Semiconductor M.17 531-537, 2004.
7. D. He, M. A. Shannon, and N. R. Miller, "Micromachined silicon electrolytic conductivity probes with integrated temperature sensor," IEEE Sensors J.5 1185-1196, 2005.
8. P. Jacobs, A. Varlan, and W. Sansen, "Design optimization of planar electrolytic conductivity sensors," Med. Biol. Eng. Comput.33, no.6 802-810, 1995.
9. B. Jiang, J. R. Smith, M. Philipose, S. Roy, K. Sundara-Rajan, and A. V. Mamishev, "Energy scavenging for inductively coupled passive RFID systems," IEEE Trans. Instrum. Measure.56 118-125, 2007.
10. C. Klapf, A. Missoni, W. Pribyl, G. Hofer, G. Holweg, and W. Kargl, "Improvements in operational distance in passive HF RFID transponder systems," in Proc. IEEE RFID 2008, 2008 350-357.
11. K. Finkenzeller, RFID Handbook, 2nd ed. London, U.K.: Wiley, 2003.
12. J.-P. Curty,N. Joehl, C. Dehollain, and M. J. Declercq, "Remotely powered addressable UHF RFID integrated system," IEEE J. Solid State Circuits40 2193-2202, 2005.
13. Q. Huang and M. Oberle, "A 0.5-mW passive telemetry IC for biomedical applications," IEEE J. Solid-State Circuits33 937-946, 1998.
14. S. Preradovic, N. C. Karmakar, and I. Balbin, "RFID transponders," IEEE Microw. Mag.9, no.5 90-103, 2008.
15. M. K. Khaw, F. Mohd-Yasin, and M. I. Reaz, "Recent advances in the integrated circuit design of RFID," in Proc. IEEE Int. Conf. Semiconductor Electron., 2004 326-330.
16. G. De Vita and G. Iannaccone, "Design criteria for the RF section of UHF and microwave passive RFID transponders," IEEE Trans. Microw. Theory Tech.53 2978-2990, 2005. (Pubitemid 41633222)
17. B. Timmer, W. Sparreboom, W. Olthuis, P. Bergveld, and A. van den Berg, "Optimization of an electrolyte conductivity detector for measuring low ion concentrations," Lab Chip2 121-124, 2002.
18. R. E. Barnett and J. Liu, "An EEPROM programming controller for passive UHF RFID transponders with gated clock regulation loop and current surge control," IEEE J. Solid-State Circuits43 1808-1815, 2008.
19. T. Umeda, H.Yoshida, S. Sekine, Y. Fujita, T. Suzuki, and S. Otaka, "A 950-MHz rectifier circuit for sensor network tags with 10-m distance," IEEE J. Solid State Circuits41 35-41, 2006.