Experimental verification of internal friction at ghz frequencies in doped single-crystal silicon

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 424-427

  Hwang, Eugene ^a   Bhave, Sunil A ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC LOSS; ANCHOR LOSS; EXPERIMENTAL VERIFICATION; GHZ FREQUENCIES; INTRINSIC LOSS; LOW TEMPERATURES; MICROMECHANICAL RESONATOR; RESONATOR DESIGN; ROOM TEMPERATURE; SILICON RESONATORS; SINGLE CRYSTAL SILICON; TEMPERATURE DEPENDENCE;

DOPING (ADDITIVES); ELECTRON ENERGY LOSS SPECTROSCOPY; MECHANICAL ENGINEERING; MECHANICS; MEMS; PHONONS; REACTIVE ION ETCHING; RESONATORS;

MONOCRYSTALLINE SILICON;

EID: 79953771761     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734452     Document Type: Conference Paper

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