Photonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling

Journal of Vacuum Science and Technology B

Volumn 29, Issue 2, 2011, Pages

  Si, Guangyuan ^a   Danner, Aaron J ^a   Teo, Siew Lang ^b   Teo, Ee Jin ^b   Teng, Jinghua ^b   Bettiol, Andrew A ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ETCHING; FABRICATION; FOCUSED ION BEAMS; LITHIUM; MILLING (MACHINING); NANORODS; NIOBIUM COMPOUNDS; PHOTONIC CRYSTALS;

ETCHING DEPTH; FOCUSED ION BEAM MILLING; LITHIUM NIOBATE; NANO-RING STRUCTURES; NANO-ROD ARRAYS; NOVEL PATTERNS; TOTAL ETCHINGS; ULTRAHIGH ASPECT RATIO;

ASPECT RATIO;

EID: 79953767164     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3557027     Document Type: Article

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