Determination of the optical bandgap and disorder energies of thin amorphous SiC and AlN films produced by radio frequency magnetron sputtering

Journal of Physics: Conference Series

Volumn 274, Issue 1, 2011, Pages

  Guerra, J A ^a   Montanez L ^a   Erlenbach, O ^b   Galvez, G ^a   De Zela, F ^a   Winnacker, A ^b   Weingartner R ^a,b  

^a PONTIFICIA UNIVERSIDAD CATÓLICA DEL PERÚ   (Peru)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; AMORPHOUS FILMS; ENERGY GAP; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; OPTICAL BAND GAPS; RADIO WAVES; SILICON CARBIDE; THIN FILMS;

DEPOSITED FILMS; DEPOSITION METHODS; DETERMINATION METHODS; DISORDER ENERGY; LINEAR RELATION; OPTICAL TRANSMISSION SPECTROSCOPY; RADIO FREQUENCY MAGNETRON SPUTTERING; THERMAL-ANNEALING;

AMORPHOUS SILICON;

EID: 79953752042     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/274/1/012113     Document Type: Conference Paper

References (18)

1. Roucka R et al 2003 Appl. Surf. Sci. 212-13 872-78
2. Kim K H et al 2004 Appl. Phys. Lett. 85 4777-79
3. Kortright J B and Windt D L 1988 Appl. Opt. 27 2841-46
4. Maqbool M, Wilson E, Clark J, Ahmad I and Kayani A 2010 Appl. Opt. 49 653-57
5. Shur M, Rumyantsev S L and Levinshtein M E S 2001 SiC Materials and Devices (Singapore: World Scientific Publishing Company)
6. Gurumurgan K, Hong Chen and Harp G R 1999 Appl. Phys. Lett. 74 3008-10
7. Khoshman J M and Kordesch M E 2005 J. Of Non-Cryst. Sol. 351 3334-40
8. Zanatta A R 2009 J. of Phys. D 42 025109-7
9. Guerra J A et al 2010 Mat. Sci. For. 645-48 263-66
10. Weingärtner R et al 2010 Mat. Sci. and Eng. B 174 114-8
11. Bickerman M et al 2009 Phys. Stat. Sol. C 7 21-4
12. Guerra J A 2010 Determination of the Optical Bandgap of thin amorphous (SiC)1-x(AlN)x films (Lima: Thesis Pontificia Universidad Católica del Perú)
13. Swanepoel R 1983 J. of Phys. E 16 1215-22
14. Galvez G et al 2010 Mat. Sci. For. 645-48 1199-202
15. Dunstan D J 1983 J. of Phys. C 16 L567-71
16. Morigaki K 1999 Physics of amorphous semiconductors (London: World Scientific Publishing Company)
17. Sadao A 1999 Optical properties of crystalline and amorphous semiconductors, (Boston: Kluwer Academic Publishers)
18. Cody G D 2005 Mater. Res. Soc. Symp. Proc. 862 A.1.3.1- 3