Solidly Mounted Resonator (SMR) FEM-BEM simulation

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2006, Pages 1474-1477

  Ekeom, D ^a   Dubus, B ^a   Volatier, A ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b STMICROELECTRONICS   (France)

Author keywords

BAW resonator; Boundary Element Method; Component; Finite Element Method; Solidly Mounted Resonator

Indexed keywords

BAW RESONATOR; BOUNDARY ELEMENTS; COMPONENT; FINITE ELEMENT; SOLIDLY MOUNTED RESONATOR;

ACOUSTIC RESONATORS; ACOUSTICS; ALUMINUM NITRIDE; BANDPASS FILTERS; BRAGG REFLECTORS; COMMUNICATION SYSTEMS; COMPUTER SOFTWARE; CRACKS; FINITE ELEMENT METHOD; MOLYBDENUM OXIDE; REFLECTION; RESONATORS; SILICON NITRIDE; SILICON OXIDES; SUBSTRATES; TUNGSTEN;

BOUNDARY ELEMENT METHOD;

EID: 55649115809     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2006.371     Document Type: Conference Paper

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