Rutherford backscattering oscillation in scanning helium-ion microscopy

Journal of Applied Physics

Volumn 109, Issue 6, 2011, Pages

  Kostinski, Sarah ^a,b   Yao, Nan ^a  

^a Princeton University ^*  (United States)

^b ST PETERSBURG ACADEMIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ANTICORRELATION; ATOMIC NUMBERS; BACK-SCATTERED; BACKSCATTERED INTENSITY; BEAM PHYSICS; ELEMENTAL TARGETS; HIGH-RESOLUTION IMAGING; ION MICROSCOPY; NANO-METER SCALE; NUCLEAR STRUCTURE; NUMERICAL SIMULATION; RUTHERFORD BACK-SCATTERING; SCATTERING GEOMETRIES; STOPPING POWER; SURFACE ELEMENTAL ANALYSIS; VALENCE ELECTRON;

BACKSCATTERING; HELIUM; ION MICROSCOPES; IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ATOMS;

EID: 79953653868     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3549016     Document Type: Article

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