New gas sensitive MIS structures Pt/Al2O3(M = Pt, Rh)/Si with a granular dielectric layer

Sensors and Actuators, B: Chemical

Volumn 133, Issue 2, 2008, Pages 613-616

  Ryzhikov, Andrey ^a,b   Robaut, Florence ^c   Labeau, Michel ^a   Gaskov, Alexandre ^b  

^a MINATEC   (France)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

^c Grenoble INP   (France)

Author keywords

Gas sensor; MIS structure; Sensitivity enhancement; Surface states

Indexed keywords

SWITCHING CIRCUITS;

MIS STRUCTURES;

ADMINISTRATIVE DATA PROCESSING;

EID: 47849100074     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.03.027     Document Type: Article

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