Water diffusion in silica glass and wet oxidation of Si: An interpretation for the high speed of wet oxidation

Journal of the Electrochemical Society

Volumn 158, Issue 5, 2011, Pages

  Tomozawa, Minoru ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MOLECULAR WATER; SILICA GLASS; SILICON OXIDATION; WATER DIFFUSION; WET OXIDATION;

BEHAVIORAL RESEARCH; DIFFUSION IN LIQUIDS; GLASS; MOLECULAR OXYGEN; OXIDATION; SILICA;

SILICON OXIDES;

EID: 79953215296     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3560037     Document Type: Article

References (15)

1. B. E. Deal and A. S. Grove, J. Appl. Phys., 36, 3770 (1965). 10.1063/1.1713945
2. A. J. Moulson and J. P. Roberts, Trans. Farad. Soc., 57, 1208 (1961). 10.1039/tf9615701208
3. F. J. Norton, Nature, 171, 701 (1961). 10.1038/191701a0
4. R. H. Doremus, in Reactivity of Solids, J. W. Mitchell, R. C. DeVries, R. W. Robert, P. Cannon, Editors, p. 667, Wiley, New York (1969).
5. K. M. Davis and M. Tomozawa, J. Non-Cryst. Solids, 185, 203 (1995). 10.1016/0022-3093(95)00015-1
6. Y. Zhang, E. M. Stolper, and G. J. Wasserburg, Earth Planet. Sci. Lett., 103, 228 (1991). 10.1016/0012-821X(91)90163-C
7. G. J. Roberts and J. P. Roberts, Phys. Chem. Glasses, 5, 26 (1964).
8. R. H. Doremus, Diffusion of Reactive Molecules in Solids and Melts, p. 85, Wiley, New York (2002).
9. N. Mott, Proc. R. Soc. Lond. A, 376, 207 (1981). 10.1098/rspa.1981.0088
10. A. Atkinson, Rev. Mod. Phys., 57, 437 (1985). 10.1103/RevModPhys.57.437
11. A. Agarwal and M. Tomozawa, J. Non-Cryst. Solids, 203, 264 (1997). 10.1016/S0022-3093(96)00570-4
12. M. Tomozawa and R. W. Hepburn, J. Non-Cryst. Solids, 345, 449 (2004). 10.1016/j.jnoncrysol.2004.08.065
13. A. Koike and M. Tomozawa, J. Non-Cryst. Solids, 354, 4981 (2004). 10.1016/j.jnoncrysol.2008.07.024
14. M. Tomozawa and S.-R. Ryu, Proceedings of the XXth ICG, Kyoto, I-70-107, (2004).
15. J. W. Lee and M. Tomozawa, J. Non-Cryst. Solids, 353, 4633 (2007). 10.1016/j.jnoncrysol.2007.07.016 (Pubitemid 350180930)