Water diffusion in silica film during silicon wet oxidation

Journal of Non-Crystalline Solids

Volumn 353, Issue 52-54, 2007, Pages 4633-4639

  Lee, J W ^a   Tomozawa, M ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Diffusion and transport; Films and coatings; FTIR measurements; Glasses; Optical spectroscopy; Oxidation; Silica; Silicon; Water in glass

Indexed keywords

DIFFUSION IN LIQUIDS; EMISSION SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FUSED SILICA; HIGH TEMPERATURE EFFECTS; OXIDATION; REACTION KINETICS;

MOLECULAR WATER; OXIDATION KINETICS;

WATER;

EID: 36549063025     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.07.016     Document Type: Article

References (22)

1. Davis K.M., and Tomozawa M. J. Non-Cryst. Solids 185 (1995) 203
2. Oehler A., and Tomozawa M. J. Non-Cryst. Solids 347 (2004) 211
3. Tomozawa M., Li H., and Davis K.M. J. Non-Cryst. Solids 179 (1994) 162
4. Tomozawa M., Kim D.L., Agarwel A., and Davis K.M. J. Non-Cryst. Solids 288 (2001) 73
5. Deal B.E., and Grove A.S. J. Appl. Phys. 36 (1965) 3770
6. Ngau J.L., Griffin P.B., and Plummer J.D. J. Electrochem. Soc. 149 (2002) F98
7. Doremus R.H. In: Mitchell J.W., DeVries R.C., Robert R.W., and Cannon P. (Eds). Reactivity of Solids (1969), Wiley, New York 667
8. M. Tomozawa, S.-R. Ryu, in: Proceedings of the XXth ICG, Kyoto, I-70-107, 2004.
9. Doremus R.H. Diffusion of Reactive Molecules in Solids and Melts (2003), Wiley, NY p. 18
10. J.-W. Lee, M. Tomozawa, R.K. MacCrone, Point defect formation and annihilation in silica glass by heat-treatment, J. Non-Cryst. Solids, submitted for publication.
11. Crank J. The Mathematics of Diffusion. 2nd Ed. (1975), Oxford University, New York p. 51
12. Tan C.Z. J. Non-Cryst. Solids 223 (1998) 158
13. Tan C.Z., and Arndt J. J. Phys. Chem. Solids 62 (2001) 1087
14. Brodsky M.B., and Cubicciotti D. J. Am. Chem. Soc. 73 (1951) 3497
15. Taft E.A. J. Electrochem. Soc. 125 (1978) 968
16. Taft E.A. J. Electrochem. Soc. 127 (1980) 993
17. Kobeda E., and Irene E.A. J. Vac. Sci. Technol. B4 (1986) 720
18. Shelby J.E. J. Non-Cryst. Solids 349 (2004) 331
19. Shackelford J.F., Masaryk J.S., and Fulrath R.M. J. Am. Ceram. Soc. 53 (1970) 417
20. Bruckner R. Glastech. Ber. 43 (1970) 8
21. Scholze H. Glass Ind. 47 (1966) 56 62
22. Tomozawa M. Annu. Rev. Mater. Sci. 26 (1996) 43