Fabrication of micro-patterned 2D Nanorod and nanohole arrays by a combination of photolithography and nanosphere lithography

Journal of the Electrochemical Society

Volumn 158, Issue 5, 2011, Pages

  Park, Hoo Keun ^a   Moon, Jung Ho ^a   Yoon, Sungho ^a   Rag Do, Young ^a  

^a Kookmin University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FACILE FABRICATION; FLUORESCENCE IMAGE; HIGH REPRODUCIBILITY; MICRO-SCALES; MICROPATTERNED; MICROPATTERNS; NANO PATTERN; NANOARRAYS; NANOHOLE ARRAYS; NANOSPHERE LITHOGRAPHY; QUARTZ SUBSTRATE; RF-MAGNETRON SPUTTERING; SIMPLE METHOD; STRUCTURAL DIMENSIONS; THIN FILM PHOSPHORS;

EUROPIUM; FABRICATION; NANORODS; NANOSPHERES; OPTOELECTRONIC DEVICES; PHOTOLITHOGRAPHY; PHOTONIC CRYSTALS; QUARTZ; SILICON COMPOUNDS;

MICROMACHINING;

EID: 79953191122     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3556703     Document Type: Article

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