Laser processing of SnO2 electrode materials for manufacturing of 3D micro-batteries

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7921, Issue , 2011, Pages

  Kohler, R ^a   Proell, J ^a   Ulrich, S ^a   Przybylski, M ^b   Pfleging, W ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b ATL Lasertechnik GmbH   (Germany)

Author keywords

Anode material; Conversion material; Excimer laser structuring; Laser structuring; Lithium ion battery; SnO2; Surface modification; Thin film technology

Indexed keywords

ANODE MATERIAL; CONVERSION MATERIAL; EXCIMER LASER STRUCTURING; LASER STRUCTURING; LITHIUM-ION BATTERY; SNO2; SURFACE MODIFICATION; THIN FILM TECHNOLOGY;

ABLATION; ANODES; ELECTROCHEMICAL PROPERTIES; ELECTROCHEMISTRY; EXCIMER LASERS; FILM THICKNESS; GAS LASERS; IONS; LITHIUM; LITHIUM ALLOYS; LITHIUM BATTERIES; LITHIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; STAINLESS STEEL; SURFACE TREATMENT; THIN FILMS; THREE DIMENSIONAL; X RAY DIFFRACTION;

MATERIALS;

EID: 79953077088     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.873686     Document Type: Conference Paper

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