Micromachined catalytic combustible hydrogen gas sensor

Sensors and Actuators, B: Chemical

Volumn 153, Issue 2, 2011, Pages 392-397

  Lee, Eui Bok ^a   Hwang, In Sung ^a   Cha, Jung Ho ^b   Lee, Ho Jun ^b   Lee, Won Bae ^b   Pak, James Jungho ^a   Lee, Jong Heun ^a   Ju, Byeong Kwon ^a  

^a Korea University   (South Korea)

^b Seju Engineering   (South Korea)

Author keywords

Catalytic combustion; Hydrogen gas sensor; MEMS

Indexed keywords

CATALYTIC COMBUSTION; HIGH RESPONSE; HYDROGEN GAS SENSOR; HYDROGEN GAS SENSORS; LOW-POWER CONSUMPTION; MEMS TECHNOLOGY; MICRO-HEATERS; MICROMACHINED; OPERATING VOLTAGE; RECOVERY TIME; REFERENCE SENSORS; SENSING ELEMENTS; SENSITIVE ELEMENTS; SINGLE CHIPS; WHEATSTONE;

CATALYSIS; COMBUSTION; GAS DETECTORS; HYDROGEN; INTEGRATION;

SENSORS;

EID: 79953027915     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.11.004     Document Type: Article

References (19)

1. N. Yamazoe Toward innovations of gas sensor technology Sens. Actuators B 108 2005 2 14
2. A. Baker, Improvements in or relating to electrically beatable filaments, UK Patent 892530 (1959).
3. M. Gall The Si-planar-pellistor array, a detection unit for combustible gases Sens. Actuators B 16 1993 260 264
4. H. Debéda Thick film pellistor array with a neural network post-treatment Sens. Actuators B 27 1995 297 300
5. E.B. Macovos, and F.W. Montague A calorimetric combustible gas detector employing platinum film heaters Sens. Actuators B 12 1993 91 94
6. X.Q. Lv A catalytic sensor using MEMS process for methane detection in mines Proceeding of the 2007 International Conference on Information Acquisition 2007 4 9
7. D.W. Dabill, and S.J. Gentry Fast-response catalytic sensor for flammable gases Sens. Actuators 11 1987 135 143 (Pubitemid 17569753)
8. M.G. Jones, and T.G. Nevell The detection of hydrogen using catalytic flammable gas sensors Sens. Actuators 16 1989 215 224
9. 2 films on micromachined hotplates Appl. Phys. Lett. 66 1995 812 814
10. V. Guidi, G.C. Cardinali, L. Dori, G. Faglia, M. Ferroni, G. Martinelli, P. Nelli, and G. Sberveglieri Thin-films gas sensor implemented on a low-power-consumption micro-machined silicon structure Sens. Actuators B 49 1998 88 92 (Pubitemid 128458050)
11. Y. Mo, Y. Okawa, M. Tajima, T. Nakai, N. Yoshiike, and K. Natukawa Micro-machined gas sensor array based on metal film micro-heater Sens. Actuators B 79 2001 175 181 (Pubitemid 32866885)
12. P. Bhattacharyya, and P.K. Basu A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane Microelectron. Reliab. 48 2008 1772 1779
13. C. Vauchier, D. Charlot, G. Delapierre, and A. Accorsi Thin-film gas catalytic microsensor Sens. Actuators B 5 1991 33 36
14. P. Krebs, and A. Grisel A low power integrated catalytic gas sensor Sens. Actuators B 13 1993 155 158 (Pubitemid 23677434)
15. M. Zanini, J.H. Visser, L. Rimai, R.E. Soltis, A. Kovalchuk, D.W. Hoffman, E.M. Logothetis, U. Bonne, L. Brewer, O.W. Bynum, and M.A. Richard Fabrication and properties of Si-based high-sensitivity microcalorimetric gas sensor Sens. Actuators A 48 1995 187 192
16. W. Shin, M. Matsuyama, N. Izu, and N. Murayama Hydrogen-selective thermoelectric gas sensor Sens. Actuators B 93 2003 304 308
17. F.D.I.S. Chen Jr., P. Chen, J. Neuner, A. Roerhl, and J. Welch MEMS-based hydrogen gas sensors Sens. Actuators B 117 2006 10 16
18. E. Sifuentes, O. Casa, F. Reverter, and R. Pallas-Areny Direct interface circuit to linearise resistive sensor bridges Sens. Actuators A 147 2008 210 215
19. J. Zhang, Y. Nagao, S. Kuwano, and Y. Ito Microstructure and temperature coefficient of resistance of platinum films Jpn. J. Appl. Phys. 36 1997 834 839 (Pubitemid 127738274)