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Volumn 318, Issue 1, 2011, Pages 394-396
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Defect structure of 4H silicon carbide ingots
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Author keywords
A1. Defects; A2. Seed crystals; A3. Physical vapor deposition processes; B1. Silicon carbide
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Indexed keywords
4H SILICON CARBIDE;
A1. DEFECTS;
A2. SEED CRYSTALS;
A3. PHYSICAL VAPOR DEPOSITION PROCESSES;
ANTIPHASE DOMAINS;
B1. SILICON CARBIDE;
DOMAIN STRUCTURE;
HIGHER ORDER;
POLYTYPES;
THREADING DEFECTS;
CRYSTALS;
INCLUSIONS;
INGOTS;
PHYSICAL VAPOR DEPOSITION;
SILICON CARBIDE;
DEFECTS;
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EID: 79952735041
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2010.10.166 Document Type: Conference Paper |
Times cited : (3)
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References (7)
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