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Volumn 318, Issue 1, 2011, Pages 394-396

Defect structure of 4H silicon carbide ingots

Author keywords

A1. Defects; A2. Seed crystals; A3. Physical vapor deposition processes; B1. Silicon carbide

Indexed keywords

4H SILICON CARBIDE; A1. DEFECTS; A2. SEED CRYSTALS; A3. PHYSICAL VAPOR DEPOSITION PROCESSES; ANTIPHASE DOMAINS; B1. SILICON CARBIDE; DOMAIN STRUCTURE; HIGHER ORDER; POLYTYPES; THREADING DEFECTS;

EID: 79952735041     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2010.10.166     Document Type: Conference Paper
Times cited : (3)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.