Gettering of iron in CZ-silicon by polysilicon layer

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 8, Issue 3, 2011, Pages 751-754

  Haarahiltunen, A ^a   Yli Koski, M ^a   Talvitie, H ^a   Vahanissi V ^a   Lindroos, J ^a   Savin, H ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Gettering; Iron; Polysilicon

Indexed keywords

BULK MICRO DEFECTS; CONTAMINATION SOURCES; CZOCHRALSKI SILICON WAFERS; GETTERING; GETTERING EFFECT; GETTERING EFFICIENCY; HIGH TEMPERATURE; INTERNAL GETTERING; IRON CONTAMINATION; IRON GETTERING; POLYSILICON GETTERING; POLYSILICON LAYERS; SILICON SURFACES; SLOW COOLING;

POLYSILICON; SEMICONDUCTING SILICON COMPOUNDS; SURFACE CLEANING;

SILICON WAFERS;

EID: 79952678835     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.201000194     Document Type: Article

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