SCOPUS 정보 검색 플랫폼

Volumn 253, Issue 1, 2010, Pages

Computational modelling and optimisation of the fabrication of nano-structures using focused ion beam and imprint forming technologies

(7) Stoyanov, S a Bailey, C a Tang, Y K a Marson, S b Dyer, A b Allen, D b Desmulliez, M c

a UNIVERSITY OF GREENWICH (United Kingdom)

b CRANFIELD UNIVERSITY (United Kingdom)

c HERIOT WATT UNIVERSITY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATION THEORY; COST ENGINEERING; DEFORMATION; FINITE ELEMENT METHOD; FOCUSED ION BEAMS; IONS; MILLING (MACHINING); MOLECULAR ELECTRONICS; NANOSTRUCTURES; PRECISION ENGINEERING; QUALITY CONTROL; RISK ASSESSMENT; THROUGHPUT;

COMPUTATIONAL MODEL; COMPUTATIONAL MODELLING; FORMING TECHNOLOGY; LARGE DEFORMATION FINITE ELEMENTS; MATERIAL DEFORMATION; PATTERN REPLICATION; PROCESS PARAMETERS; PRODUCT MANUFACTURABILITY;

ION BEAMS;

EID: 79952394487 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/253/1/012008 Document Type: Conference Paper

Times cited : (6)

References (11)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.