Selective ablation of photovoltaic materials with UV laser sources for monolithic interconnection of devices based on a-Si:H

Materials Science and Engineering: B

Volumn 159-160, Issue C, 2009, Pages 18-22

  Molpeceres, C ^a   Lauzurica, S ^a   Garcia Ballesteros J J ^a   Morales, M ^a   Guadano G ^a   Ocana J L ^a   Fernandez S ^b   Gandia J J ^b   Villar, F ^c   Nos, O ^c   Bertomeu, J ^c  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b CIEMAT   (Spain)

^c UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Laser processing; Thin film laser ablation; Thin film silicon

Indexed keywords

HEAT AFFECTED ZONE; II-VI SEMICONDUCTORS; INTEGRATED CIRCUIT INTERCONNECTS; LASER ABLATION; LASER MATERIALS PROCESSING; PUMPING (LASER); SILICON COMPOUNDS; THIN FILMS; ZINC OXIDE;

A-SI:H; LASER PROCESS; LASER SOURCES; LASERS ABLATIONS; MONOLITHICS; PHOTOVOLTAIC MATERIALS; SELECTIVE ABLATIONS; THIN FILM SILICON; THIN-FILM LASER ABLATION; UV WAVELENGTH;

AMORPHOUS SILICON;

EID: 67349106124     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2008.09.012     Document Type: Article

References (5)

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3. Fonrodona M., Soler D., Asensi J.M., Bertomeu J., and Andreu J. J. Non-Cryst. Solids 299-302 (1991) 14-19
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5. Molpeceres C., Lauzurica S., Ocana J.L., Gandia J.J., Urbina L., Carabe J., Villar F., Escarré J., Bertomeu J., and Andreu J. In: Gombert A. (Ed). Photonics for Solar Energy Systems; Proceedings of the SPIE, vol. 6197 (2006)