Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Bulletin of Materials Science

Volumn 31, Issue 4, 2008, Pages 681-686

  Hu, Zongqian ^a   Li, Dezhan ^a   Xie, Kai ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

LiPON; Radio frequency power; Solid state electrolyte; Thin films

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTROMAGNETIC WAVES; LITHIUM; NITRIDES; PHOSPHORUS; RADIO; RADIO WAVES; THICK FILMS; THIN FILMS;

LIPON; RADIO FREQUENCY POWER; SOLID STATE ELECTROLYTE;

SOLID ELECTROLYTES;

EID: 51749085110     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12034-008-0108-z     Document Type: Article

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