SCOPUS 정보 검색 플랫폼

Volumn 11, Issue 5, 2011, Pages 974-977

A rapid and economical method for profiling feature heights during microfabrication

(6) Yen, Gloria S a Fujimoto, Bryant S a Schneider, Thomas a Huynh, Desmond T K a Jeffries, Gavin D M a Chiu, Daniel T a

a UNIVERSITY OF WASHINGTON (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURACY; ARTICLE; CONTROLLED STUDY; INTERFEROMETRY; INTERMETHOD COMPARISON; MICROTECHNOLOGY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; STRUCTURE ANALYSIS;

EID: 79952254247 PISSN: 14730197 EISSN: 14730189 Source Type: Journal
DOI: 10.1039/c0lc00470g Document Type: Article

Times cited : (12)

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