Monolithic integration of micro-channel on disposable flow sensors for medical applications

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 66-74

  Billat, S ^a   Kliche, K ^a   Gronmaier, R ^a   Nommensen, P ^a   Auber, J ^a   Hedrich, F ^a   Zengerle, R ^a  

^a Institute for Micromachining and Information Technology   (Germany)

Author keywords

Adhesive free packaging; Flow sensor; Integration of micro channel; Low measurement range

Indexed keywords

ARCHITECTURAL DESIGN; CHIP SCALE PACKAGES; COMPUTER NETWORKS; ELECTRONIC EQUIPMENT MANUFACTURE; FLOW RATE; FLUIDICS; MEDICAL APPLICATIONS; MICROFLUIDICS; MONOLITHIC INTEGRATED CIRCUITS; PACKAGING; SENSORS; STANDARDS; TECHNOLOGY;

(OTDR) TECHNOLOGY; BOND PROCESSES; ELSEVIER (CO); FLOW SENSORS; LOW FLOWS; MICRO CHANNELS; MICRO FLOW CHANNELS; MONOLITHIC INTEGRATIONS; PACKAGING COSTS; POLY-DIMETHYL SILOXANE (PDMS); POTASSIUM OXIDE (KOH) ETCHING; PRESSURE DIFFERENCES; REPRODUCIBILITY; SENSOR DESIGNS;

DETECTORS;

EID: 44849096479     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.10.059     Document Type: Article

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