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Volumn 10, Issue 11, 2010, Pages 7300-7302
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Fabrication of nanopores for biomacromolecule detection
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Author keywords
Biomacromolecule detection; Focused ion beam; Nanopores
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Indexed keywords
BEAM CURRENTS;
BIOMACROMOLECULE DETECTION;
DETECTOR FABRICATION;
DIRECT WRITING;
FOCUSED-ION-BEAM SYSTEM;
HIGH QUALITY;
ION BEAM EXPOSURE;
OPTIMIZED CONDITIONS;
PROCESS PARAMETERS;
SILICON NITRIDE FILM;
THICK MEMBRANES;
THIN MEMBRANE;
COMMINUTION;
DETECTORS;
FABRICATION;
ION BEAMS;
IONS;
SILICON NITRIDE;
NANOPORES;
DNA;
ARTICLE;
NANOPORE;
TRANSMISSION ELECTRON MICROSCOPY;
DNA;
MICROSCOPY, ELECTRON, TRANSMISSION;
NANOPORES;
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EID: 79952112061
PISSN: 15334880
EISSN: None
Source Type: Journal
DOI: 10.1166/jnn.2010.2867 Document Type: Conference Paper |
Times cited : (6)
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References (16)
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