Influence of surface conductivity on sensitivity of acoustic wave gas sensors based on multilayered structures

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 58, Issue 2, 2011, Pages 451-460

  Fan, Li ^a   Zhou, Feng Mei ^a   Wang, Cheng ^a   Gao, Hui Dong ^a   Zhang, Shu Yi ^a   Zhang, Hui ^a   Wang, Xiang Bang ^b  

^a NANJING UNIVERSITY   (China)

^b CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION   (China)

Author keywords

Acoustics; Conductivity; Dielectric constant; Piezoelectric films; Sensitivity; Substrates

Indexed keywords

CENTRAL FREQUENCY; CONDUCTIVITY; DIELECTRIC CONSTANT; DIELECTRIC CONSTANTS; ELECTROMECHANICAL COUPLING COEFFICIENTS; GAS SENSORS; MULTI-LAYERED STRUCTURE; MULTILAYERED MATERIALS; PIEZOELECTRIC FILM; SENSITIVE LAYERS; SENSITIVITY; SURFACE CONDUCTIVITY;

ACOUSTIC WAVES; ACOUSTICS; ELECTRIC CONDUCTIVITY; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; SURFACES; TRANSFER MATRIX METHOD;

SENSORS;

EID: 79952017834     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2011.1822     Document Type: Article

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