Influence of material parameters on acoustic wave propagation modes in ZnO/Si bi-layered structures

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 12, 2005, Pages 2361-2369

  Gao, Hui Dong ^a   Zhang, Shu Yi ^a   Qi, Xue ^a   Wasa, K ^a   Wu, Hao Dong ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

Acoustic wave propagation modes; Bilayered structures; Dispersion relations; Electromechanical coupling coefficients; Si; Transfer matrix method; Wave field distributions; ZnO Si

Indexed keywords

BI-LAYERED STRUCTURES; DISPERSION RELATIONS; WAVE FIELD DISTRIBUTIONS;

ELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; SILICON; THIN FILMS; ZINC OXIDE;

ACOUSTIC WAVE PROPAGATION;

SILICON; ZINC OXIDE;

ACOUSTICS; ARTICLE; CHEMICAL MODEL; CHEMISTRY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ECHOGRAPHY; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; RADIATION DOSE; RADIATION EXPOSURE; RADIOMETRY; TRANSDUCER;

ACOUSTICS; COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MODELS, CHEMICAL; RADIATION DOSAGE; RADIOMETRY; SILICON; TRANSDUCERS; ULTRASONOGRAPHY; ZINC OXIDE;

EID: 32844471243     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1563280     Document Type: Article

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