Integrated PiezoMEMS actuators and sensors

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 2193-2196

  Polcawich, Ronald G ^a   Pulskamp, Jeffrey S ^a   Bedair, Sarah ^a   Smith, Gabriel ^a   Kaul, Roger ^a   Kroninger, Chris ^a   Wetzel, Eric ^a   Chandrahalim, Hengky ^b   Bhave, Sunil A ^b  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS AND SENSORS; HIGH FREQUENCY FILTERS; HIGH QUALITY FACTORS; LEAD ZIRCONATE TITANATE THIN FILMS; MEMS FABRICATION; MOTIONAL RESISTANCE; PIEZOELECTRIC MEMS; PZT; RESONANT TRANSFORMERS; SENSING TECHNOLOGY; STRAIN SENSORS; SWITCHABLE RESONATOR;

HIGH FREQUENCY TRANSFORMERS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; RESONATORS; SEMICONDUCTING LEAD COMPOUNDS;

SENSORS;

EID: 79951939681     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690603     Document Type: Conference Paper

References (10)

1. R. Polcawich, J. Pulskamp, D. Judy, P. Ranade, S. Trolier-McKinstry, and M. Dubey, "Surface Micromachined Microelectromechancial Ohmic Series Switch Using Thin-Film Piezoelectric Actuators," IEEE Transactions Microwave Theory and Techniques, Vol. 55, pp. 2642-2654, Dec 2007.
2. H. Chandrahalim, S.A. Bhave, R.G. Polcawich, J. Pulskamp, D. Judy, R. Kaul, and M. Dubey, "Influence of Silicon on Quality Factor, Motional Impedance and Tuning Range of PZT-Transduced Resonators," Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, pp. 360-363, 2008.
3. J.R. Bronson, J.S. Pulskamp, R.G. Polcawich, C.M. Kroninger, and E.D. Wetzel, "PZT MEMS Actuated Flapping Wings for Insect-Inspired Robotics", IEEE Conf. MEMS, Sorrento, Italy, pp. 1047-1050, 2009.
4. S. Dey, K. Budd, and D. Payne, "Sol-gel Processing of PbTiO3, PbZrO3, PZT, and PLZT Thin Films," Br. Ceram. Proc., vol. 36, pp. 107-121, 1985.
5. G. L. Smith, R. G. Polcawich, J. S. Pulskamp, Todd Waggoner, and J. F. Conley, Jr., "Atomic Layer Deposited Alumina for use as an Etch Barrier Against Xenon Difluoride Etching," Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, pp. 194-198, 2010.
6. H. Chandrahalim, S. A. Bhave, R.G. Polcawich, J. Pulskamp, D. Judy, R. Kaul, and M. Dubey "Performance Comparison of Pb(Zr0.52Ti0.48)O3-Only and Pb(Zr0.52Ti0.48)O3-On-Silicon Resonators," App. Phys. Lett., vol. 93, pp. 233504 , 2008.
7. S. S. Bedair, J. Pulskamp, B. Morgan, and R. Polcawich, "Performance model of electrode tailored thin film piezoelectric transformers for high frequency switched mode power supplies," Power MEMS 2009, Silver Spring, Maryland, pp. 435-438, December 1 - 4, 2009.
8. D. J. Chung, R. G. Polcawich, D. Judy, J. Pulskamp, and J. Papapolymerou., "A SP2T and a SP4T Switch using Low Loss Piezoelectric MEMS," IEEE MTT-S Microwave Symposium, pp. 21-24, June 2008.
9. J.S. Pulskamp, D.C. Judy, R.G. Polcawich, R. Kaul, H. Chandrahalim, and S.A. Bhave, "Monolithically Integrated PiezoMEMS SP2T Switch and Contour Mode Filters", IEEE Conf. MEMS, Sorrento, Italy, pp. 900-903, 2009.
10. J. S. Pulskamp, G. L. Smith, R. G. Polcawich, C. M. Kroninger, and E. D. Wetzel, "Two Degree of Freedom PZT MEMS Actuated Flapping Wings With Integrated Force Sensing," Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, pp. 390-391, 2010.