Rapid, wafer-scale laser nanoprinting of polymer surfaces

ACS Nano

Volumn 5, Issue 2, 2011, Pages 690-692

  Penner, Reginald M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER INTERFERENCE PATTERNING; MASK LESS; NANO PATTERN; NANO SCALE; NANOPATTERNING; NANOPRINTING; NANOSPHERE LITHOGRAPHY; POLYMER SURFACES; PROCESSING STEPS; WAFER-SCALE;

NANOIMPRINT LITHOGRAPHY;

POLYMERS;

EID: 79951923100     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn200353p     Document Type: Article

References (17)

1. Autumn, K.; Liang, Y.; Hsieh, S.; Zesch, W.; Chan, W.; Kenny, T.; Fearing, R.; Full, R. Adhesive Force of a Single Gecko Foot-Hair Nature 2000, 405, 681-685 (Pubitemid 30428653)
2. Barthlott, W.; Neinhuis, C. The Purity of Sacred Lotus or Escape from Contamination in Biological Surfaces Planta 1997, 202, 1-8 (Pubitemid 27201419)
3. Geim, A.; Dubonos, S.; Grigorieva, I.; Novoselov, K.; Zhukov, A.; Shapoval, S. Microfabricated Adhesive Mimicking Gecko Foot-Hair Nat. Mater. 2003, 2, 461-463
4. Kwaki, J.-S.; Kim, T.-W. A Review of Adhesion and Friction Models for Gecko Feet Int. J. Prec. Eng. Manuf. 2010, 11, 171-186
5. Fang, H.; Yuan, D.; Guo, R.; Zhang, S.; Han, R. P. S.; Das, S.; Wang, Z. L. Fabrication of Patterned Polymer Nanowire Arrays ACS Nano 2011, 5, 1477-1483
6. Deckman, H.; Dunsmuir, J. Natural Lithography Appl. Phys. Lett. 1982, 41, 377-379
7. Deckman, H.; Dunsmuir, J. Applications of Surface Textures Produced with Natural Lithography J. Vac. Sci. Technol., B 1983, 1, 1109-1112 (Pubitemid 14492491)
8. Hulteen, J.; Van Duyne, R. Nanosphere Lithography: A Materials General Fabrication Process for Periodic Particle Array Surfaces J. Vac. Sci. Technol., A 1995, 13, 1553-1558
9. Haynes, C.; McFarland, A.; Van Duyne, R.; Godwin, H. Nanopatterning with Lithography J. Chem. Educ. 2005, 82, 768A-768B
10. Zhang, X.; Yonzon, C.; Van Duyne, R. Nanosphere Lithography Fabricated Plasmonic Materials and Their Applications J. Mat. Res. 2006, 21, 1083-1092 (Pubitemid 44136966)
11. Kustandi, T. S.; Samper, V. D.; Yi, D. K.; Ng, W. S.; Neuzil, P.; Sun, W. Self-Assembled Nanoparticles Based Fabrication of Gecko Foot-Hair-Inspired Polymer Nanofibers Adv. Funct. Mater. 2007, 17, 2211-2218 (Pubitemid 47396209)
12. Chou, S.; Krauss, P.; Renstrom, P. Imprint of Sub-25 nm Vias and Trenches in Polymers Appl. Phys. Lett. 1995, 67, 3114-3116
13. Chou, S.; Krauss, P.; Renstrom, P. Imprint Lithography with 25-Nanometer Resolution Science 1996, 272, 85-87 (Pubitemid 126554924)
14. Savas, T.; Farhoud, M.; Smith, H.; Hwang, M.; Ross, C. Properties of Large-Area Nanomagnet Arrays with 100 nm Period Made by Interferometric Lithography J. Appl. Phys. 1999, 85, 6160-6162 (Pubitemid 129651066)
15. Savas, T.; Shah, S.; Schattenburg, M.; Carter, J.; Smith, H. Achromatic Interferometric Lithography for 100-nm-Period Gratings and Grids J. Vac. Sci. Technol., B 1995, 13, 2732-2735
16. Savas, T.; Schattenburg, M.; Carter, J.; Smith, H. Large-Area Achromatic Interferometric Lithography for 100 nm Period Gratings and Grids J. Vac. Sci. Technol., B 1996, 14, 4167-4170 (Pubitemid 126582854)
17. Ross, C.; Hwang, M.; Shima, M.; Smith, H.; Farhoud, M.; Savas, T.; Schwarzacher, W.; Parrochon, J.; Escoffier, W.; Bertram, H. et al. Magnetic Properties of Arrays of Electro Deposited Nanowires J. Magn. Magn. Mater. 2002, 249, 200-207 (Pubitemid 35263314)