Uncertainty evaluation for three-dimensional scanning electron microscope reconstructions based on the stereo-pair technique

Measurement Science and Technology

Volumn 22, Issue 3, 2011, Pages

  Carli, L ^a   Genta, G ^b   Cantatore, A ^a   Barbato, G ^b   De Chiffre, L ^a   Levi, R ^b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

Measurement uncertainty; Multiple view strategy; SEM; Stereo pair technique; Surface reconstruction; Wire gauge

Indexed keywords

GAGES; REPAIR; ROTATION; SCANNING ELECTRON MICROSCOPY; SURFACE RECONSTRUCTION; UNCERTAINTY ANALYSIS;

GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENTS; MEASUREMENT UNCERTAINTY; METROLOGICAL CHARACTERISTICS; MULTIPLE VIEW RECONSTRUCTION; MULTIPLE VIEWS; STEREO-PAIR TECHNIQUE; THREE-DIMENSIONAL SCANNING; WIRE GAUGES;

STEREO IMAGE PROCESSING;

EID: 79951873317     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/3/035103     Document Type: Article

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