First demonstration and performance of AlGaN based focal plane array for deep-UV imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7474, Issue , 2009, Pages

  Reverchon, J L ^a   Bansropun, S ^a   Robo, J A ^a   Truffer, J P ^a   Costard, E ^a   Frayssinet, E ^b   Brault, J ^b   Semond, F ^b   Duboz, J Y ^b   Idir, M ^c  

^a THALES RESEARCH AND TECHNOLOGY   (France)

^b CRHEA CNRS   (France)

^c SYNCHROTRON SOLEIL   (France)

Author keywords

AlGaN Focal Plane Array; Deep UV

Indexed keywords

ACTIVE LAYER; ALGAN; ALGAN FOCAL PLANE ARRAY; ALGAN LAYERS; CRACK EXPANSION; DEEP UV; DRY ETCHING PROCESS; FLIP CHIP; HIGH-QUALITY MATERIALS; IN-BETWEEN; INTERNAL ELECTRIC FIELDS; MEMBRANE INTEGRITY; NOISE FACTOR; NON-UNIFORMITIES; PARASITIC CAPACITANCE; PEAK RESPONSE; READ-OUT CIRCUIT; RESPONSIVITY; SCHOTTKY PHOTODIODES; SI SUBSTRATES; SILICON SUBSTRATES; SPECTRAL RESPONSIVITY; WINDOW LAYER;

ALUMINUM; CAPACITANCE; ELECTRIC FIELDS; FOCAL PLANE ARRAYS; FOCUSING; GALLIUM; HETEROJUNCTION BIPOLAR TRANSISTORS; HONEYCOMB STRUCTURES; PHOTOEXCITATION; PLASMA ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON SOLAR CELLS; SUBSTRATES; WINDOWS;

DRY ETCHING;

EID: 70450200753     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.830287     Document Type: Conference Paper

References (5)

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