Annealing and texturing of a-Si film using Nd3+:YAG laser with Gaussian and flat-top beam profiles

IEEE Region 10 Annual International Conference, Proceedings/TENCON

Volumn , Issue , 2010, Pages 1909-1914

  Palani, I A ^a   Rajiv, G ^a   Vasa, N J ^a   Singaperumal, M ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Amorphous silicon; Laser annealing; Laser texturing; Photovolataic applictaions; Polycrytsalline silicon

Indexed keywords

A-SI FILMS; FLAT TOP BEAM; GAUSSIANS; LASER ANNEALING; LASER SPOTS; LASER TEXTURING; LASER-ASSISTED; NANOTEXTURING; PHOTOVOLATAIC APPLICTAIONS; POLYCRYTSALLINE SILICON; TEXTURIZATION; THIRD HARMONIC; YAG LASER;

ACOUSTOOPTICAL EFFECTS; AMORPHOUS FILMS; ANNEALING; GAUSSIAN BEAMS; LASERS; NEODYMIUM; PULSED LASERS;

AMORPHOUS SILICON;

EID: 79951624818     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TENCON.2010.5686429     Document Type: Conference Paper

References (4)

1. G L.A. Dobrazan, A. Drygalaa, K. Golombeka, P. Panek, E. Bielan, P. Zie: Laser surface treatment of multicrystalline silicon in enhancing optical properties, Journal of Materials Processing Technology, 201 (2008), pp 291-296.
2. I. A. Palani, N. J. Vasa and M. Singaperumal, "Crystallization and ablation in annealing of amorphous-Si thin film on glass and crystalline-Si substrates irradiated by third harmonics of Nd3+:YAG laser", Mater. Sci. Semicond. Process., 11, (2008) 107-116.
3. I.A.Palani, N.J.Vasa, M.Singaperumal, T.Okada "Investigation on laser-annealing and subsequent laser-nanotexturing of amorphous silicon (a-Si) films for photovoltaic application", Journal of laser micro and Nano Engineering(2010)(Articlein n press).
4. I.A.Palani, N.J.Vasa, M.Singaperumal, T.Okada "Influence of laser wavelength and beam profile on Nd3+:YAG laser assisted formation of polycrystalline Si films", Thin solid films, 518, (2010), 4183-4190.