Research on a novel capacitive pressure sensor to measure chamber pressures of different caliber artilleries

IEEE Sensors Journal

Volumn 11, Issue 4, 2011, Pages 862-868

  Li, Xin'e ^a   Zu, Jing ^a   Ma, Tiehua ^a   Xu, Peng ^b  

^a National Key Laboratory for Electronic Measurement Technology   (China)

^b NORTH UNIVERSITY OF CHINA   (China)

Author keywords

Applications; capacitive pressure sensor; piezo gauge shell

Indexed keywords

CAPACITIVE PRESSURE SENSORS; CHAMBER PRESSURE; COAXIAL CYLINDERS; ELECTRODE DISTANCES; FINITE ELEMENT SOFTWARE; LOWER COST; MECHANICAL CHARACTERISTICS; PIEZO GAUGE SHELL; PRESSURE MEASURING; PRESSURE SENSITIVE; RESEARCH AND DEVELOPMENT; SENSITIVE ELEMENTS;

COMPUTER SOFTWARE; CYLINDERS (SHAPES); GAGES; PRESSURE SENSORS; SHELLS (STRUCTURES);

PARTIAL PRESSURE SENSORS;

EID: 79951527052     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2070793     Document Type: Article

References (19)

1. Y.-L. Zhang and G.-L. Liu, "A Computer test system of gun peak chamber pressure," J. Ballistics, vol. 10, no. 2, pp. 78-80, 1998, 6.
2. J.-L. Zhang, H.-N. Lu, and S.-M. Ren, "The dynamic response error in chamber pressure measurement," J. Tai Yuan Inst. Mach., vol. 14, no. 1, pp. 22-26, 1993, 1.
3. D.-R. Kong, M.-W. Zhu, and S.-N. Zhang, "Simple discussion of the actuality & the development of copper cylinders," Metrol. Measur. Tech., vol. 1, no. 5, pp. 15-16, 2001.
4. K. H. L. Chau and S. R. Lewis, "An integrated force-balanced capacitive accelerometer for low g applica (Pubitemid 126356996)
5. M. Lemkin and B. E. Boser, "A micro machined fully differential lateral accelerometer," in Proc. IEEE 1996 Custom Integrated Circuits Conf. [C], 1996, pp. 135-318.
6. A. Chavan and K. D. Wise, "A batch-processed vacuum-sealed capacitive pressure sensor," in Proc. 9th Int. Conf. Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, 1997, pp. 1449-1452.
7. E. G. Bakhoum and M. H. M. Cheng, "Capacitive pressure sensor with very large dynamic range," IEEE Trans. Comp. Packag. Technol., vol. 33, no. 1, pp. 79-83, Jan. 2010.
8. P. Cheng, Z. Zhan, D.-D. Li, and F. Zhen, "A dhesive bonding with SU-8 in a vacuum for capacitive pressure sensors," Sensors Actuators A, vol. 147, no. 2, pp. 672-676, 2008, 10.
9. L. Peng and M.-Q. Li, "Design and production of thick film ceramic capacitive pressure sensor," Sensor World, vol. 12, no. 12, pp. 12-15, 2006, 12.
10. Z.-W. Wang and L.-J. Wang, "Silicon pressure sensor of capacitance," J. LiaoNing Univ., vol. 32, no. 2, pp. 131-134, 2005, 2, Natural Science Edition.
11. W. H. Ko, "High-temperature single-crystal 3C-SiC capacitive pressure sensor," IEEE Sensors J., vol. 4, no. 4, pp. 464-470, Aug. 2004.
12. M. E. Casada, "Fringing field capacitance sensor for measuring the moisture content of agricultural commodities," IEEE Sensors J., vol. 8, no. 3, pp. 240-247, Jun. 2008. (Pubitemid 351185399)
13. Z.-S. Hang and S.-L. Zhou, Elastic Mechanics. Hangzhou, China: ZheJiang Inst. Press, 1989.
14. R. Hu and Q. Wang, ANSYS8.2 design for mechanism. Beijing, China: China Machine Press, 2005.
15. T. Masuda, "Low capacitance measurement circuit for sapphire based capacitive pressure sensor," in Proc. 20th Sensor Symp. Sensors, Micromachines and Appl. Syst., vol. 20, no. 2003, pp. 127-130.
16. H. Xiaodong, H. Jianqiu, Q. M. Huang, and Qing'an, "A novel capacitive pressure sensor," Chin. J. Semicond., vol. 29, no. 3, pp. 428-432, 2008, 3.
17. S. O. Nelson, "Capacitance sensor for nondestructive measurement of moisture content in nuts and grain," IEEE Trans. Instrum. Measure. , vol. 56, no. 5, pp. 1809-1813, Oct. 2007. (Pubitemid 47455903)
18. H.Banand Z. Li,"Anovel capacitance sensor for fireside corrosionmeasurement," Rev. Sci. Instrum., vol. 80, no. 11, pp. 107-115, 2009, 12.
19. Y. S. Lee and K. D. Wise, "A batch-fabricated silicon capacitive pressure transducer with lowtemperature sensitivity," IEEE Trans. Electron Devices, vol. 29, no. 1, pp. 42-48, Jan. 1982.