Novel capacitive pressure sensor

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 29, Issue 3, 2008, Pages 428-432

  Huang, Xiaodong ^a   Huang, Jianqiu ^a   Qin, Ming ^a   Huang, Qing'an ^a  

^a Southeast University   (China)

Author keywords

Adhesive bonding; Capacitive pressure senor; Electrostriction; Linearity; Pn junction self stop etching

Indexed keywords

CAPACITANCE; CAPACITORS; ELECTROSTRICTION; ETCHING; HYSTERESIS; PERMITTIVITY; SEMICONDUCTOR JUNCTIONS;

ADHESIVE BONDING; CAPACITIVE PRESSURE SENOR; LINEARITY; PN JUNCTION SELF STOP ETCHING;

PRESSURE SENSORS;

EID: 41949141451     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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