Porous silicon and porous polymer substrates for optical chemical sensors

Journal of Nanophotonics

Volumn 4, Issue 1, 2010, Pages

  Hajj Hassan, Mohamad ^a   Kim, Sung Jin ^b   Cheung, Maurice C ^a   Yao, Lei ^a   Chodavarapu, Vamsy P ^a   Cartwright, Alexander N ^b  

^a MCGILL UNIVERSITY   (Canada)

^b the State University of New York   (United States)

Author keywords

Bragg gratings; dry etching; gas sensors; holography; optical sensors; oxygen sensors; porous polymer; porous silicon; xenon difluoride

Indexed keywords

BIOCOMPATIBILITY; BRAGG GRATINGS; CHEMICAL SENSORS; DRY ETCHING; ELECTROCHEMICAL ETCHING; FLUORINE COMPOUNDS; HOLOGRAPHY; HYDROFLUORIC ACID; LIQUID CRYSTALS; MESOPOROUS MATERIALS; MORPHOLOGY; OPTICAL PROPERTIES; OPTICAL SENSORS; OXYGEN SENSORS; PHASE SEPARATION; POLYMERS; PORE SIZE; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SILICON PHOTONICS; SUBSTRATES; WET ETCHING;

CHEMICAL AND BIOLOGICAL SENSING; CHEMICAL AND BIOLOGICALS; HIGH SURFACE-TO-VOLUME RATIO; HOLOGRAPHIC POLYMER DISPERSED LIQUID CRYSTAL; MANUFACTURING TECHNIQUES; OPTICAL CHEMICAL SENSORS; POROUS POLYMERS; XENON DIFLUORIDE;

POROUS SILICON;

EID: 79551715932     PISSN: None     EISSN: 19342608     Source Type: Journal    
DOI: 10.1117/1.3472237     Document Type: Article

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