Fabrication and energy harvesting measurements of vibrating MEMS piezoelectric benders

Journal of Vibration and Acoustics

Volumn 133, Issue 1, 2011, Pages

  Mo, Changki ^a   Knight, Ryan R ^a   Frederick, Amanda A ^a   Clark, William W ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ENERGY HARVESTING; FABRICATION; MEMS; PIEZOELECTRICITY; SILICA;

BOTTOM ELECTRODES; ENERGY; INTER-DIGITATED ELECTRODES; INTERDIGITATED ELECTRODES; MEASUREMENTS OF; MICROBENDERS; PIEZOELECTRIC; PIEZOELECTRIC BENDERS; POWER; RESISTIVE LOADS;

NATURAL FREQUENCIES;

EID: 79551643742     PISSN: 10489002     EISSN: 15288927     Source Type: Journal    
DOI: 10.1115/1.4002784     Document Type: Article

References (24)

1. Erturk, A., and Inman, D. J., 2008, "A Distributes Parameter Electromechanical Model for Cantilevered Piezoelectric Energy Harvesters," ASME J. Vibr. Acoust., 130, p. 041002.
2. Shahruz, S. M., 2008, "Performance of Mechanical Bandpass Filters Used in Energy Scavenging in the Presence of Fabrication Errors and Coupling," ASME J. Vibr. Acoust., 130, p. 054505.
3. Erturk, A., Tarazaga, P. A., Farmer, J. R., and Inman, D. J., 2009, "Effect of Strain Nodes and Electrode Configuration on Piezoelectric Energy Harvesting From Cantilevered Beams," ASME J. Vibr. Acoust., 131, p. 011010.
4. Renno, J. M., Daqaq, M. F., and Inman, D. J., 2009, "On the Optimal Energy Harvesting From a Vibration Source," J. Sound Vib., 320, pp. 386-405.
5. Jeon, Y. B., Sood, R., Jeong, J.-H., and Kim, S.-G., 2005, "MEMS Power Generator With Transverse Mode Thin Film PZT," Sens. Actuators, A, 122, pp. 16-22.
6. Choi, W. J., Jeon, Y., Sood, R., and Kim, S. G., 2006, "Energy Harvesting MEMS Device Based on Thin Film Piezoelectric Cantilevers," J. Electroceram., 17, pp. 543-548.
7. Hong, Y. K., Moon, K. S., and Levy, M., 2006, "Single-Crystal Film Piezoelectric Sensors, Actuators, and Energy Harvesters With Interdigitated Electrodes," Ferroelectrics, 342, pp. 1-13.
8. Shen, D., Park, J. H., Vjitsaria, J., Choe, S. Y., Wikle, H. C., and Kim, D. J., 2008, "The Design, Fabrication and Evaluation of a MEMS PZT Cantilever With an Integrated Si Proof Mass for Vibration Energy Harvesting," J. Micromech. Microeng., 18, p. 055017.
9. Lee, B. S., Lin, S. C., Wu, W. J., Wang, X. Y., Chang, P. Z., and Lee, C. K., 2009, "Piezoelectric MEMS Generators Fabricated With an Aerosol Deposition PZT Thin Film," J. Micromech. Microeng., 19, p. 065014.
10. Reilly, E. K., and Wright, P. K., 2009, "Modeling, Fabrication and Stress Compensation of an Epitaxial Thin Film Piezoelectric Microscale Energy Scavenging Device," J. Micromech. Microeng., 19, p. 095014.
11. Dutoit, N. E., Wardle, B. L., and Kim, S.-G., 2005, "Design Considerations for MEMS-Scale Piezoelectric Mechanical Vibration Energy Harvesters," Integr. Ferroelectr., 71, pp. 121-160.
12. Dutoit, N. E., and Wardle, B. L., 2006, "Performance of Microfabricated Piezoelectric Vibration Energy Harvesters," Integr. Ferroelectr., 83, pp. 13-32.
13. Xu, B., Ye, Y., Cross, L. E., Bernstein, J. J., and Miller, R., 1999, "Dielectric Hysteresis From Transverse Electric Fields in lead Zirconate Titanate Thin Films," Appl. Phys. Lett., 74(23), pp. 3549-3551.
14. Zhao, H., Ren, T., and Zhang, N., 2003, "High-Frequency Properties of PZT for RF-Communication Applications," Mater. Sci. Eng., B, 99-1-3-, pp. 192-194.
15. Cheng, J., and Meng, Z., 2001, "Thickness-Dependent Microstructures and Electric Properties of PZT Films Derived From Sol-Gel Process," Thin Solid Films, 385, pp. 5-10.
16. Chen, B., Huang, C., and Wu, L., 2003, "Crack Alleviation Processing of Lead Zirconate Titanate Thin Films Deposited by Sol-Gel Method," Thin Solid Films, 441, pp. 13-18.
17. Zhu, M., and Kirby, P. B., 2006, "Design Study of Piezoelectric Micro-Machined Mechanically Coupled Cantilever Filters Using a Combined Finite Element and Microwave Circuit Analysis," Sens. Actuators, A, 126, pp. 417-424.
18. Wang, Z., Kokawa, H., and Takizawa, H., 2007, "Low-Temperature Processing of Lead Zirconate Titanate Thin Films by 28 GHz Microwave Irradiation for MEMS Application," Proc. SPIE, 6413, p. 641308.
19. Frederick, A. A., 2006, "Analysis and Fabrication of MEMS Tunable Piezoelectric Resonators," MS thesis, University of Pittsburgh, Pittsburgh, PA.
20. Knight, R., 2007, "The Analysis and Testing of MEMS and Macro Scale Piezoelectric Devices," MS thesis, University of Pittsburgh, Pittsburgh, PA.
21. Knight, R., Mo, C., and Clark, W. W., 2008, "Development and Testing of a MEMS Piezoelectric Energy Harvester," Proc. SPIE, 7288, p. 72880A.
22. Mo, C., Kim, S., and Clark, W. W., 2005, "Analysis of Power Generating Performance for Unimorph Cantilever Piezoelectric Beams With the Interdigitated Electrode," Proceedings of ASME IDETC, Long Beach, CA.
23. Mo, C., Kim, S., and Clark, W. W., 2009, "Theoretical Analysis of Energy Harvesting Performance for Unimorph Piezoelectric Benders With Interdigitated Electrodes," Smart Mater. Struct., 18, p. 055017.
24. Clark, W. W., and Ramsay, M. J., 2000, "Smart Material Transducers as Power Sources for MEMS Devices," International Symposium on Smart Structures and Microsystems, Hong Kong, Oct. 19-21.