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Volumn 257, Issue 7, 2011, Pages 2886-2890

Physical mechanism of silicon ablation with long nanosecond laser pulses at 1064 nm through time-resolved observation

Author keywords

Laser silicon ablation; Nanosecond laser ablation

Indexed keywords

ABLATION; CHARGE COUPLED DEVICES; LASER PRODUCED PLASMAS; LASER PULSES; LIQUIDS; SILICON;

EID: 79251601349     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.10.086     Document Type: Article
Times cited : (43)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.