Laser ablation of Si in water and ambient air

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 39-42

  Zhu, S ^a   Hong, M H ^a   Koh, M L ^a   Lu, Y F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Acoustic wave; Laser ablation; Real time monitoring; Water confinement regime

Indexed keywords

ACOUSTIC WAVES; AIR; CALIBRATION; EXCIMER LASERS; HIGH PRESSURE EFFECTS; HIGH TEMPERATURE EFFECTS; LASER BEAM EFFECTS; LASER PRODUCED PLASMAS; SILICON; WATER;

WATER CONFINEMENT REGIME (WCR);

LASER ABLATION;

EID: 0036386020     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.456836     Document Type: Article

References (12)

1. M.L. Ngan, K.C. Lee and K.W. Cheah: J. Appl. Phys. 83, (1998) 1637.
2. B.S. Yilbas and A. Kar: Opt. Laser Eng. 30, (1998) 93.
3. A. Luft, U. Franz, A. Emsermann and J. Kaspar: Appl. Phys. A-Mater. 63, (1996) 93.
4. B.J. Bartholomeusz and M.C. Gupta: Appl. Optics 31, (1992) 4829.
5. M. Ignatiev, I. Smurov and G. Flamant: Meas. Sci. Technol. 5, (1994) 563.
6. D. Devaux, R. Fabbro, L. Tollier and E. Barmicki: J. Appl. Phys. 74, (1993) 2268.
7. L. Berthe, R. Fabbro, P. Peyre, L. Tollier and E. Bartinicki: J. Appl. Phys. 82, (1997) 2826.
8. K.U. Riemann: J. Phys. D Appl. Phys. 24, (1991) 493.
9. T. Sakka, S. Iwanaga, Y. H. Ogata, A. Matsunawa and T. Takemoto: J. Chem. Phys. 112, (2000) 8645.
10. J.C. Isselin, A.P. Alloncle and M. Autric: J. Appl. Phys. 84, (1998) 5766.
11. M. Aden, E.W. Kreutz, and A. Voss: J Phys D: Appl Phys 26, (1993) 1545.
12. R. Fabbro, J. Fournier, P. Ballard, D. Devaux, and J. Virmont: J. Appl. Phys. 68, (1990) 775.