High power single-shot laser ablation of silicon with nanosecond 355 nm

Applied Surface Science

Volumn 252, Issue 22, 2006, Pages 7823-7825

  Karnakis, D M ^a  

^a OXFORD LASERS LTD   (United Kingdom)

Author keywords

DPSS lasers; Explosive boiling; Silicon; Single shot laser ablation

Indexed keywords

CRYSTALLINE MATERIALS; HEATING; LASER ABLATION; NANOTECHNOLOGY; PLASMAS;

DPSS LASERS; EXPLOSIVE BOILING; SECONDARY PLASMA HEATING; SINGLE-SHOT LASER ABLATION;

SILICON;

EID: 33747891326     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.09.040     Document Type: Article

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