A fuzzy AHP-based fault diagnosis for semiconductor lithography process

International Journal of Innovative Computing, Information and Control

Volumn 7, Issue 2, 2011, Pages 805-815

  Shen, Chien Wen ^a   Cheng, Ming Jen ^b   Chen, Cheng Wu ^c   Tsai, Feng Ming ^c   Cheng, Yu Chenr ^d  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b Graduate Institute of Management   (Taiwan)

^c NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^d ADVANCED SEMICONDUCTOR ENGINEERING INC   (Taiwan)

Author keywords

Analytic hierarchy process; Fault diagnosis; Fuzzy set theory; Lithography

Indexed keywords

CONVENTIONAL APPROACH; CRITERIA AND INDICATORS; DECISION SUPPORTS; DYNAMIC BUSINESS ENVIRONMENT; FAULT DIAGNOSIS; FAULT EVALUATION; FUZZY AHP; FUZZY ANALYTIC HIERARCHY PROCESS; IMPROVEMENT PLANS; LITHOGRAPHY PROCESS; MODEL HIERARCHY; SEMICONDUCTOR LITHOGRAPHY; SEMICONDUCTOR MANUFACTURERS; SEMICONDUCTOR MANUFACTURING;

ANALYTIC HIERARCHY PROCESS; DECISION SUPPORT SYSTEMS; FUZZY LOGIC; FUZZY SET THEORY; FUZZY SETS; HIERARCHICAL SYSTEMS; MANUFACTURE; PROFITABILITY;

LITHOGRAPHY;

EID: 79251471068     PISSN: 13494198     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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