Data mining and fault diagnosis based on wafer acceptance test data and in-line manufacturing data

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2001, Pages 171-174

  Fan, Chih Min ^a   Guo, Ruey Shan ^b   Chen, Argon ^b   Hsu, Kuo Ching ^c   Wei, Chih Shih ^c  

^a Technical Department   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c Manufacturing Corp   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DATA MINING; DATABASE SYSTEMS; QUALITY CONTROL; WSI CIRCUITS;

FAULT DIAGNOSIS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035171373     PISSN: 1523553X     EISSN: None     Source Type: Journal    
DOI: 10.1109/ISSM.2001.962941     Document Type: Article

References (5)

1. Yield analysis and improvement by reducing manufacturing fluctuation noise
2. Solving tough semiconductor, manufacturing problems using data mining
3. The emerging role of data mining
4. Diagnosis with diagrams
5. SHEWMA: An end-of-line SPC scheme using WAT data