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Volumn 43, Issue 1-2, 2011, Pages 103-106

Investigating the relation between the secondary yield enhancement and the structure of the metallic overlayer in metal-assisted SIMS

Author keywords

gold; in situ; MetA SIMS; morphology; polycarbonate; polystyrene; ToF SIMS; XPS

Indexed keywords

ARGON ION; DEPOSITED METAL; EVAPORATION FLUX; IN SITU; META-SIMS; METAL-ASSISTED SIMS; METALLIZATIONS; MOLECULAR FILMS; SAMPLE SURFACE; SECONDARY ION YIELD; STICKING COEFFICIENTS; TOF SIMS; XPS; YIELD ENHANCEMENT;

EID: 78951490166     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3425     Document Type: Conference Paper
Times cited : (7)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.