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Volumn 43, Issue 1-2, 2011, Pages 103-106
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Investigating the relation between the secondary yield enhancement and the structure of the metallic overlayer in metal-assisted SIMS
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Author keywords
gold; in situ; MetA SIMS; morphology; polycarbonate; polystyrene; ToF SIMS; XPS
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Indexed keywords
ARGON ION;
DEPOSITED METAL;
EVAPORATION FLUX;
IN SITU;
META-SIMS;
METAL-ASSISTED SIMS;
METALLIZATIONS;
MOLECULAR FILMS;
SAMPLE SURFACE;
SECONDARY ION YIELD;
STICKING COEFFICIENTS;
TOF SIMS;
XPS;
YIELD ENHANCEMENT;
ARGON;
GOLD;
ION BOMBARDMENT;
IONS;
MORPHOLOGY;
POLYMER BLENDS;
POLYMERS;
POLYSTYRENES;
QUARTZ;
SECONDARY ION MASS SPECTROMETRY;
X RAY PHOTOELECTRON SPECTROSCOPY;
GOLD COATINGS;
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EID: 78951490166
PISSN: 01422421
EISSN: 10969918
Source Type: Journal
DOI: 10.1002/sia.3425 Document Type: Conference Paper |
Times cited : (7)
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References (19)
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