Strategies for improving the sensitivity of FIB-SIMS

Surface and Interface Analysis

Volumn 43, Issue 1-2, 2011, Pages 495-497

  Li, Libing ^a   McPhail, David S ^a   Yakovlev, Nikolai ^b   Seng, Hweeleng ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

FIB SIMS; ION TOF IV; oxygen flooding; secondary ion yield enhancement

Indexed keywords

ALTERED LAYER; FIB-SIMS; IONIZATION PROBABILITIES; OXYGEN FLOODING; OXYGEN IMPLANTATION; SECONDARY ION YIELD;

CHEMICAL ANALYSIS; OXYGEN; SECONDARY EMISSION; SURFACE ANALYSIS; SURFACE CHEMISTRY;

IONS;

EID: 78951488319     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3450     Document Type: Conference Paper

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