Preparation and patterning of nanoscale hybrid materials for micro-optics

Journal of Optoelectronics and Advanced Materials

Volumn 12, Issue 10, 2010, Pages 2007-2013

  Obreja, P ^a   Cristea, D ^a   Teodorescu, V S ^b   Dinescu, A ^a   Obreja, A C ^a   Comanescu, F ^a   Rebigan, R ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

Author keywords

Electron beam lithography; Nan Composite polymers; Patterning materials; XTEM

Indexed keywords

COMPOSITE FILMS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; FILM PREPARATION; METAL NANOPARTICLES; METALS; MICROLENSES; MICROOPTICS; OPTICAL WAVEGUIDES; ORGANIC POLYMERS; OXIDE MINERALS; PARTICLE SIZE; REFRACTIVE INDEX; SOL-GELS; TIO2 NANOPARTICLES; TITANIUM DIOXIDE; ULTRAVIOLET VISIBLE SPECTROSCOPY; ZIRCONIA;

COMMERCIAL POLYMERS; COMPOSITE POLYMER; INORGANIC NANOPARTICLE; METAL OXIDE NANOPARTICLES; REPLICATION TECHNIQUES; SPECTROELLIPSOMETRY; UV-VIS SPECTROSCOPY; XTEM;

HYBRID MATERIALS;

EID: 78751666962     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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