SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1147-1149

Resist-based silver nanocomposites synthesized by lithographic methods

(5) Marques Hueso, J a Abargues, R a Canet Ferrer, J a Valdes, J L a Martinez Pastor, J a

a UNIVERSITY OF VALENCIA (Spain)

Author keywords

Lithography; Nanocomposite; Nanoparticles; Plasmon; Resist; Silver

Indexed keywords

ABSORBANCES; ELECTRON RADIATION; LITHOGRAPHIC METHODS; LITHOGRAPHIC PROPERTIES; NEGATIVE TONES; OPTICAL LITHOGRAPHY; POLYMERIC PATTERNS; RESIST; SILVER METAL; SILVER NANOPARTICLES; UV LITHOGRAPHY;

CROSSLINKING; ELECTRON BEAMS; NANOCOMPOSITES; NANOPARTICLES; ORGANIC POLYMERS; PHOTOLITHOGRAPHY; PLASMONS;

SILVER;

EID: 76949102592 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2009.10.043 Document Type: Article

Times cited : (20)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.