Surface form measurement using single shot off-axis fizeau interferometry

Journal of the Optical Society of Korea

Volumn 14, Issue 4, 2010, Pages 409-414

  Abdelsalam, Dahi Ghareab ^a,b   Baek, Byung Joon ^a   Cho, Yong Jai ^c   Kim, Daesuk ^a  

^a Chonbuk National University   (South Korea)

^b NATIONAL INSTITUTE FOR STANDARDS   (Egypt)

^c Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Fizeau interferometer; Numerical reconstruction; Off axis geometry; Phase shifting

Indexed keywords

3D SURFACE; FIZEAU INTERFEROMETERS; FIZEAU INTERFEROMETRY; IN-LINE; NUMERICAL RECONSTRUCTION; OFF-AXIS; OFF-AXIS GEOMETRY; PHASE MAPS; PHASE SHIFTING; SINGLE SHOTS; SMOOTH SURFACE;

COMPUTATIONAL GEOMETRY; INTERFEROMETERS; INTERFEROMETRY; LASER OPTICS;

PHASE SHIFT;

EID: 78651246293     PISSN: 12264776     EISSN: None     Source Type: Journal    
DOI: 10.3807/JOSK.2010.14.4.409     Document Type: Article

References (23)

1. M. Born and E. Wolf, Principles of Optics (Cambridge University Press, Cambridge, England, 1980).
2. Q. Kemao, "Two-dimensional windowed Fourier transform for fringe pattern analysis: principles, applications and implementations," Optics and Lasers in Engineering 45, 304-317 (2007).
3. R. Robinson and G. T. Reid, Interferogram Analysis (Institute of Physics Publishing, Bristol and Philadelphia, USA, 1993).
4. M. Takeda, H. Ina, and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, 156-160 (1982).
5. D. Kim, S. Kim, H. J. Kong, and Y. Lee, "Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter," Opt. Lett. 27, 1893-1895 (2002).
6. D. Kim and Y. J. Cho, "3-D surface profile measurement using an acousto-optic tunable filter based spectral phase shifting technique," J. Opt. Soc. Korea 12, 281-287 (2008).
7. J. W. Goodman and R. W. Lawrence, "Digital image formation from electrically detected holograms," Appl. Phys. Lett. 11, 77-79 (1967).
8. D. Gabor, "A new microscopic principle," Nature (London) 161, 777-778 (1948).
9. I. Yamaguchi and T. Zhang, "Phase-shifting digital holography," Opt. Lett. 22, 1268-1270 (1997).
10. Y. Takaki, H. Kawai, and H. Ohzu, "Hybrid holographic microscopy free of conjugate and zero-order images," Appl. Opt. 38, 4990-4996 (1999).
11. E. Cuche, F. Bevilacqua, and C. Depeursinge, "Digital holography for quantitative phase contrast imaging," Opt. Lett. 24, 291-293 (1999).
12. R. W. Kronrod, N. S. Merzlyakov, and L. P. Yaroslavkii, "Reconstruction of a hologram with a computer," Sov. Phys. Tech. 17, 333-334 (1972).
13. E. Leith and J. Upatnieks, "Microscopy by wavefront reconstruction," J. Opt. Soc. Am. 55, 569-570 (1965).
14. D. C. Ghiglia and M. D. Pritt, Two-dimensional Phase Unwrapping: Theory, Algorithm, and Software (Wiley, New York, USA, 1998).
15. S. B. Howell, Handbook of CCD Astronomy (Cambridge University Press, Cambridge, England, 2006).
16. D. G. Abdelsalam, M. S. Shaalan, and M. M. Eloker, "Surface microtopography measurement of a standard flat surface by multiple-beam interference fringes at reflection," Optics and Lasers in Engineering 48, 543-547 (2010).
17. G. H. Spencer and M. V. R. K. Murty, "General ray-tracing procedure," J. Opt. Soc. Am. 52, 672-678 (1962).
18. N. Lindlein and J. Schwider, "Local wave fronts at diffractive elements," J. Opt. Soc. Am. A 10, 2563-2572 (1993).
19. N. Lindlein and H. P. Herzig, "Design and modeling of a miniature system containing micro-optics," Proc. SPIE 4437, 1-13 (2001).
20. Y.-Y. Cheng and J. C. Wyant, "Phase shifter calibration in phase-shifting interferometry," Appl. Opt. 24, 3049-3052 (1985).
21. R. A. Nicolaus, "Precise method to determining systematic errors in phase-shifting interferometry on Fizeau interference," Appl. Opt. 32, 6380-6386 (1993).
22. Guide To the Expression of Uncertainty in Measurement, International Organization for Standardization, ISO, 1995.
23. E. Cuche, P. Marquet, and C. Depeursinge, "Aperture apodization using cubic spline interpolation: application in digital holographic microscopy," Opt. Comm. 182, 59-69 (2000).