Surface microtopography measurement of a standard flat surface by multiple-beam interference fringes at reflection

Optics and Lasers in Engineering

Volumn 48, Issue 5, 2010, Pages 543-547

  Abdelsalam, D G ^a   Shaalan, M S ^a   Eloker, M M ^b  

^a NATIONAL INSTITUTE FOR STANDARDS   (Egypt)

^b Al Azhar University   (Egypt)

Author keywords

Flat fielding; Multiple beams; Optical flat; Piezoelectric actuator; Ray tracing

Indexed keywords

COLLIMATED LASER BEAMS; DIGITAL DETECTOR; EXPOSURE AREAS; FIELD METHODS; FLAT SURFACES; INCIDENT BEAMS; INHOMOGENEITIES; INTERFEROMETRY TECHNIQUE; MICRO TOPOGRAPHY; MULTIPLE BEAM; MULTIPLE BEAMS; MULTIPLE-BEAM INTERFERENCE FRINGE; OPTICAL FLAT; PHASE-SHIFTING; REFLECTING LAYERS; SURFACE MICROTOPOGRAPHY; UNCERTAINTY BUDGET;

ELEMENTARY PARTICLE SOURCES; INTERFEROMETRY; PIEZOELECTRICITY; UNCERTAINTY ANALYSIS;

PIEZOELECTRIC ACTUATORS;

EID: 77249162143     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2009.12.015     Document Type: Article

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