MEMS sensor for in situ TEMnanoindentation with simultaneous force and current measurements

Journal of Micromechanics and Microengineering

Volumn 20, Issue 6, 2010, Pages

  Nafari, A ^a,b   Angenete, J ^a   Svensson, K ^c   Sanz Velasco, A ^b   Enoksson, P ^b  

^a Nanofactory Instruments AB   (Sweden)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c KARLSTAD UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC BONDING; CAPACITIVE FORCES; CURRENT MEASUREMENTS; DEEP REACTIVE ION ETCH; DIFFERENT GEOMETRY; IN-SITU; IN-SITU TEM; IN-SITU TRANSMISSION; INDENTERS; MEMS SENSORS; METAL DEPOSITION; ON CHIPS; TEM; THERMAL OXIDATION;

ANODIC OXIDATION; IN SITU PROCESSING; NANOINDENTATION; SENSORS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRIC CURRENT MEASUREMENT;

EID: 78650909775     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/6/064017     Document Type: Article

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